Alicat mass flow meters and controllers require gases to be clean and free from particulates larger than 5-50 microns, depending upon the instrument’s flow range. Our in-line sintered filters prevent particulates larger than this from entering the measurement head of the instrument.
Our in-line filters screw directly into the threaded inlet process connection of your mass flow meter or mass flow controller.
We recommend the following maximum particulate sizes for your mass flow instrument:
- Flow ranges of 0-1 sccm or less: maximum 5 microns (5 μm)
- Flow ranges between 0-2 sccm and 0-500 sccm: maximum 20 microns (20 μm)
- Flow ranges of 0-1 slpm or more: maximum 50 microns (50 μm)