0.5 SCCM Flow Meter

Specification

• Measurement range: 0.00005 to 0.5 SCCM (0.01% to 100% of full scale)
• Flow measurement accuracy: ±(0.8% of reading + 0.2% of full scale)
• Flow measurement repeatability: ±(0.2% of reading + 0.02% of full scale)
• Operating pressure range: 11.5 to 160 PSIA
• Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA – whichever is greater
• Operating temperature range: -10 to +60°C
• Temperature reading accuracy: ±0.75°C
• Warm up time: <1 second
• Typical indicated flow response time: <10 ms
• Pressure drop: 1 PSID
• Process connections: M5 – Female (10-32 compatible)
• Dimensions: 3.897″x2.375″x1.050″

Downloads

0.5 – 5 SCCM Meter Specification Sheet

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• 0.5 SCCM
• 1 SCCM
• 2 SCCM
• 5 SCCM
• 10 SCCM
• 20 SCCM

• 50 SCCM
• 100 SCCM
• 200 SCCM
• 500 SCCM
• 1 SLPM
• 2 SLPM

• 5 SLPM
• 10 SLPM
• 20 SLPM
• 50 SLPM
• 100 SLPM
• 250 SLPM

• 500 SLPM
• 1000 SLPM
• 2000 SLPM
• 3000 SLPM
• 5000 SLPM