Specification
- Measurement range: 0.00005 to 0.5 SCCM (0.01% to 100% of full scale)
- Flow measurement accuracy: ±(0.8% of reading + 0.2% of full scale)
- Flow measurement repeatability: ±(0.2% of reading + 0.02% of full scale)
- Operating pressure range: 11.5 to 160 PSIA
- Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA – whichever is greater
- Operating temperature range: -10 to +60°C
- Temperature reading accuracy: ±0.75°C
- Warm up time: <1 second
- Typical indicated flow response time: <10 ms
- Pressure drop: 1 PSID
- Process connections: M5 – Female (10-32 compatible)
- Dimensions: 3.897″x2.375″x1.050″