- 0.025 SCCM to 5000 SLPM available flow measurement range
- 0.01% to 100% of full scale measurement range
- ±0.6% of reading accuracy on most flow ranges
- ±0.1% of reading + 0.02% of full scale repeatability
- −10°C to +60°C Operating Temperature
- 145 psig max operating procedure
- 25°C & 1 atm STP default (user selectable)
- 10 ms measurement response time
Need a different communication or connector configuration?
Start by selecting your full flow range below.
Measure Mass Flow, Volumetric Flow, Process Pressure and Temperature – Simultaneously!
Alicat M Series mass flow meters monitor your mass and volumetric flow as well as your process pressure and temperature. This is all done simultaneously and every M series comes preloaded with 98 gases and gas mixtures, you can even add your own gas blends!
The mass flow meter is repeatable and accurate with calibrations up to +/- 0.4% of reading accuracy. Every Alicat mass flow meter has a 10000:1 turndown ratio with full scale flow rates starting from 0.5 SCCM per minute up to 5000 SLPM.
The mass flow meter can be used as a standalone meter with the use of local display and push button keypad with a colour TFT display an option. The local display allows the user to see all flow data visible on one screen (mass flow, volumetric flow, absolute pressure, temperature).
RS-232 communications are standard as well as an analogue output signal such as 0-5 Vdc. Alicat M series can also be configured to support Industrial Protocols such as DeviceNet, EtherNet/IP, Modbus-TCP/IP and many others.
Every Alicat device is backed by the manufacturer’s limited life time warranty and ships with a NIST traceable calibration certificate.
M series mass flow meters have a maximum operating pressure of 145 PSIG.
CSA/ATEX area classification is optional. Ex nA IIC, T4 Tamb. -40°C ≤ Ta ≤ +50°C.
- Leak checking
- Flow characterization
- Calibration standard